Surface tension studies of (Si, N)-containing diamond-like carbon films deposited by hexamethyldisilazane

Diamond and Related Materials

Volumn 12, Issue 3-7, 2003, Pages 968-973

  Chen, Liang Yih ^a   Chau Nan Hong, Franklin ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Carbon films; Hexamethyldisilazane; Nanoparticle; Surface tension

Indexed keywords

CHEMICAL BONDS; INDUCTIVELY COUPLED PLASMA; NANOSTRUCTURED MATERIALS; SURFACE TENSION; X RAY PHOTOELECTRON SPECTROSCOPY;

BIPOLAR-PULSED POWER SUPPLY;

DIAMOND LIKE CARBON FILMS;

DIAMOND;

EID: 0037508693     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(02)00351-5     Document Type: Article

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