Synthesis of nanosize Si-C-N powder in low pressure plasmas

Vacuum

Volumn 52, Issue 1-2, 1999, Pages 153-156

  Andujar J L ^a   Viera, G ^a   Polo, M C ^a   Maniette, Y ^a   Bertran, E ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; CERAMIC MATERIALS; DECOMPOSITION; GLOW DISCHARGES; HYDROGEN BONDS; NANOSTRUCTURED MATERIALS; PARTICLE SIZE ANALYSIS; POWDERS; SILICON NITRIDE; SYNTHESIS (CHEMICAL); TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

GLOW DISCHARGE DECOMPOSITION; NANOMETRIC POWDERS; SILICON CARBONITRIDE;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 0032762925     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(98)00225-5     Document Type: Article

References (11)

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