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Applied Surface Science

Volumn 173, Issue 3-4, 2001, Pages 313-317

Preparation of silicon carbide nitride thin films by sputtering of silicon nitride target

(5) Peng, Xiaofeng a Song, Lixin a Meng, Jia a Zhang, Yuzhi a Hu, Xingfang a

a SHANGHAI INSTITUTE OF CERAMICS (China)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; ARGON; METHANE; NITRIDES; SEMICONDUCTING SILICON; SILICON COMPOUNDS; SINGLE CRYSTALS; SPUTTERING; SUBSTRATES; SYNTHESIS (CHEMICAL); TARGETS; THIN FILMS;

SILICON CARBIDE NITRIDE;

SURFACE TREATMENT;

EID: 0034836747 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(01)00010-1 Document Type: Article

Times cited : (21)

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