Rapid crystallization of a-Si:H films with various silicon-to-hydrogen bonding configurations using rapid energy transfer annealing

Thin Solid Films

Volumn 500, Issue 1-2, 2006, Pages 316-321

  Jiang, Yeu Long ^a   Chang, Yung Chih ^a  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

Amorphous silicon; Annealing; Chemical vapor deposition; Crystallization

Indexed keywords

AMORPHOUS SILICON; ANNEALING; CRYSTALLIZATION; ENERGY TRANSFER; HYDROGEN; HYDROGEN BONDS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SCATTERING; REFRACTIVE INDEX; TRANSMISSION ELECTRON MICROSCOPY;

MONOHYDRIDE BONDS; POLYHYDRIDE BONDS;

AMORPHOUS FILMS;

EID: 31744450425     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.10.059     Document Type: Article

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