Morphological and structural effects of excimer laser treatment of amorphous silicon

Micron

Volumn 31, Issue 3, 2000, Pages 299-307

  Loreti, S ^a   Della Sala, D ^a   Garozzo, M ^a  

^a ENEA C R CASACCIA   (Italy)

Author keywords

Atomic force microscopy; Channelling; Crystallite size; Laser; Orientation; Polycrystals; Recrystallization; Scanning electron microscopy; Silicon; Thin film; X ray diffraction

Indexed keywords

EID: 0034049029     PISSN: 09684328     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0968-4328(99)00097-9     Document Type: Conference Paper

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