Hydrogen-effusion-induced structural changes and defects in a-Si:H films: Dependence upon the film microstructure

Physical Review B - Condensed Matter and Materials Physics

Volumn 53, Issue 7, 1996, Pages 3804-3812

  Zellama, K ^a   Chahed, L ^a   Sladek P ^a   Theye M ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 3042877108     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.53.3804     Document Type: Article

References (26)

1. J. C. Knights and R. A. Liyan, Appl. Phys. Lett. 35, 244 (1979).
2. G. Lucovsky, B. N. Davidson, G. N. Parsons and C. Wang, J. Non Cryst. Solids 144, 154 (1989).
3. P. Roca i Cabarrocas, J. B. Chévrier, J. Huc, A. Lloret, J. Y. Parey, and J. P. M. Schmitt, J. Vac. Sci. Technol. A 9, 2331 (1991).
4. P. Roca i Cabarrocas, R. Vanderhagen, Y. Bouizem, M. L. Thèye, D. Mencaraglia, Z. Djebbour, J. Sib, J. P. Kleider, C. Longeaud, and C. Godet, in Proceedings of the 10th ECPSEC, edited by A. Luque, G. Sola, W. Palz, G. Dos Santos, and P. Helm (Klwer Academic, Dordrecht, 1991), p. 1083.
5. R. Roca i Cabarrocas, Y. Bouizem and M. L. Thèye, Philos. Mag. B 65, 1025 (1992).
6. P. Roca i Cabarrocas, Z. Djebbour, J. P. Kleider, C. Longeaud, D. Mencaraglia, J. Sib, Y. Bouizem, M. L. Thèye, J. Sardin and J. P. Stoquert, J. Phys. I (France) 2, 1979 (1992).
7. R. Meaudre, M. Meaudre, P. Roca i Cabarrocas, S. Tanidi, Y. Bouizem, and M. L. Thèye, J. Non Cryst. Solids 137 138, 171 (1991).
8. K. Zellama, J. H. von Bardeleben, V. Quillet, Y. Bouizem, P. Sládek, M. L. Thèye, and P. Roca i Cabarrocas, J. Non Cryst. Solids 164 166, 285 (1993).
9. A. A. Langford, M. L. Fleet, B. P. Nelson, W. A. Lanford and N. Maley, Phys. Rev. B 45, 13367 (1992).
10. P. Sládek, Y. Bouizem, M. L. Thèye, and P. Roca i Cabarrocas, in Proceedings of 11th ECPSEC (Harwood Academic, Switzerland, 1993), p. 710.
11. P. Roca i Cabarrocas, J. Non Cryst. Solids 164 166, 37 (1993).
12. H. Shirai, B. Drevillon, N. Layadi, and P. Roca i Cabarrocas, J. Non Cryst. Solids 164 166, 119 (1993).
13. S. J. Jones, Y. Chen, D. L. Williamson, U. Kroll, and P. Roca i Cabarrocas, J. Non Cryst. Solids 164 166, 131 (1993).
14. S. M. Myers, D. M. Bishop, D. M. Follstaedt, H. J. Stein, and W. R. Wampler, in Microcrystalline Semiconductors: Materials Science and Devices, edited by P. M. Fauchet et. al MRS Symposia Proceedings Vol. 283 (Materials Research Society, Pittsburgh, 1993), p. 549.
15. G. Sardin and J. L. Morenza, Solar Energy Materials 20, 189 (1990). See also related references inside.
16. W. Beyer and H. Wagner, J. Phys. (Paris) Colloq. 42, C4 783 (1981).
17. L. Chahed, M. L. Thèye and B. Bourdon, J. Phys. 44, 387 (1983).
18. K. Zellama, P. Germain, S. Squelard, J. M. Berger, F. Dechelle, J. P. Ferraton, A. Donnadieu and B. Bourdon, Solid State Commun. 56, 721 (1985).
19. D. Jousse, E. Bustaret and F. Boullitrop, Solid State Commun. 55, 485 (1985).
20. S. K. Deb, Thin Solid Films 163, 75 (1988).
21. J. P. Kleider, C. Longeaud, and P. Roca i Cabarocas, J. Non Cryst. Solids 164 166, 403 (1993).
22. D. K. Biegelsen, R. A. Street, C. C. Tsai and J. C. Knights, Phys. Rev. B 20, 4839 (1979).
23. M. Stutzmann, Philos. Mag. B 60, 531 (1989).
24. D. Adler, Solar Cells 9, 133 (1983).
25. H. Wagner and W. Beyer, Solid State Commun. 48, 585 (1983).
26. W. Paul, in Amorphous Silicon and Related Materials Vol. 1A, edited by H. Fritsche (World Scientific, Singapore, 1988), p. 63.