Rapid Energy Transfer Annealing for the Crystallization of Amorphous Silicon

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 42, Issue 8 B, 2003, Pages

  Jiang, Yeu Long ^a  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

Amorphous silicon; Polysilicon; Rapid energy transfer annealing

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; CRYSTALLIZATION; CURRENT VOLTAGE CHARACTERISTICS; ENERGY TRANSFER; HEAT CONDUCTION; RAMAN SCATTERING; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

ENERGY PLATES;

AMORPHOUS SILICON;

EID: 0142063472     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.l999     Document Type: Article

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