TFT fabrication on MILC polysilicon film with pulsed rapid thermal annealing

Proceedings of the IEEE Hong Kong Electron Devices Meeting

Volumn , Issue , 2000, Pages 72-75

  Yuen, C Y ^a   Poon, M C ^a   Chan, M ^a   Chan, W Y ^a   Qin, M ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLIZATION; POLYCRYSTALLINE MATERIALS; RAPID THERMAL ANNEALING; SEMICONDUCTING FILMS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE;

METAL-INDUCED-LATERAL-CRYSTALLIZATION (MILC); THERMAL PULSE ANNEALING;

THIN FILM TRANSISTORS;

EID: 0034480052     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)