Characterization of poly-Si thin films deposited by magnetron sputtering onto Ni prelayers

Journal of Applied Physics

Volumn 87, Issue 7, 2000, Pages 3532-3536

  Guliants, E ^a   Anderson, W A ^a  

^a State University of New York   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001108199     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.372377     Document Type: Article

References (14)

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