Integration of polymer and metal microstructures using liquid-phase photopolymerization

Journal of Micromechanics and Microengineering

Volumn 16, Issue 2, 2006, Pages 332-340

  Agarwal, Abhishek K ^a   Beebe, David J ^a   Jiang, Hongrui ^a  

^a University of Wisconsin Madison   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROFORMING; INTEGRATION; LITHOGRAPHY; MICROSTRUCTURE; PHOTOPOLYMERIZATION; PHOTOSENSITIVITY;

LIQUID PHASE; MICROFLUIDIC COMPONENTS; SELF-PLANARIZATION; THICK POLYMERS;

POLYMERS;

EID: 31344475104     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/2/018     Document Type: Article

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