Experimental investigation of an embedded root method for stripping SU-8 photoresist in the UV-LIGA process

Journal of Micromechanics and Microengineering

Volumn 14, Issue 3, 2004, Pages 356-364

  Ho, Chien Hung ^a   Hsu, Wensyang ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROPLATED STRUCTURES; MOLD STRIPPING PROCESS;

ADHESION; DEFORMATION; ELECTROPLATING; ETCHING; INTERFACES (MATERIALS); MASKS; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; MOLDING; SILICA; ULTRAVIOLET RADIATION;

PHOTORESISTS;

EID: 1642619078     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/3/007     Document Type: Article

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