Movable microstructures made by two-photon three-dimensional microfabrication

Proceedings of the International Symposium on Micro Machine and Human Science

Volumn , Issue , 1999, Pages 173-178

  Maruo, Shoji ^a   Ikuta, Koji ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMACHINING; MICROSTRUCTURE; PHOTOPOLYMERIZATION; SILICON;

LIQUID PHOTOPOLYMERIZABLE RESINS; MICROFABRICATION; MOVABLE MICROSTRUCTURES;

MICROELECTROMECHANICAL DEVICES;

EID: 0033344684     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)