EFAB: Rapid, low-cost desktop micromachining of high aspect ratio true 3-D MEMS

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 244-251

  Cohen, Adam ^a   Zhang, Gang ^a   Tseng, Fan Gang ^a   Frodis, Uri ^a   Mansfeld, Florian ^a   Will, Peter ^a  

^a UNIVERSITY OF SOUTHERN CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ELECTRODEPOSITION; INTEGRATED CIRCUIT MANUFACTURE;

ELECTROCHEMICAL FABRICATION (EFAB);

MICROMACHINING;

EID: 0032658390     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.1999.746824     Document Type: Conference Paper

References (4)