An on-chip autonomous microfluidic cooling system

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 364-367

  Agarwal, Abhishek K ^a   Sridharamurthy, Sudheer S ^a   Beebe, David J ^a   Jiang, Hongrui ^a  

^a University of Wisconsin Madison   (United States)

Author keywords

Autonomous; Magnetic actuator; Microfluidic; Micropump; On chip cooling

Indexed keywords

MAGNETIC ACTUATORS; MAGNETIC STIRRERS; MICROFLUIDIC COOLING SYSTEM; MICROPUMPS; ON-CHIP COOLING;

ELECTROPLATING; HYDROGELS; MAGNETIC FIELD EFFECTS; NICKEL; PHOTOPOLYMERIZATION;

FLUIDIC DEVICES;

EID: 27544436279     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1496431     Document Type: Conference Paper

References (10)

1. A. Bar-Cohen, A. Watwe, and K.N. Seetharamu, "Fundamentals of thermal management"; pp. 213-217 in Fundamentals of Microsystems Packaging, Ed. R.R. Tummala, McGraw-Hill, London, 2001.
2. nd annual Conf. on Microtechnologies in Medicine & Biology, pp. 227-231, Madison, WI, USA, May 2-4, 2002.
3. J. Darabi, M.M. Ohadi, and D. DeVoe, "An electrohydrodynamic polarizing micropump for electronic cooling," J. Microelectromech. Syst., 10, 98-106 (2001).
4. E.N. Wang, L. Zhang, L. Jiang, J.-M. Koo, J.G. Maveety, E.A. Sanchez, K.E. Goodson, and T.W. Kenny, "Micromachined jets for liquid impingement cooling of VLSI chips," J. Microelectromech. Syst., 13, 833-842 (2004).
5. A.K. Agarwal, S.S. Sridharamurthy, T.M, Pearce, G.A. Mensing, D.J. Beebe, and H. Jiang, "Magnetically-driven actuation using liquid-phase polymerization (LPP) and its application: A programmable mixer," Proc. of Solid State Sensor, Actuator, and Microsystem Workshop, pp. 121-124, Hilton Head Island, SC, USA, June 6-10, 2004.
6. st annual Conf. on INSS, pp. 51-55, Tokyo, Japan, June 22-23, 2004.
7. D.J, Beebe, J.S. Moore, Q. Yu, R.H. Liu, M.L. Kraft, B-H Jo, and C. Devadoss, "Microfluidic tectonics: A comprehensive construction platform for microfluidic systems," PNAS, 97(25), 13488-13493 (December 5, 2000).
8. Microfab® NI 100 data sheet, July 2000, Enthone-OMI Inc., West Haven, CT, USA.
9. J. Zou, C. Liu, J. Schutt-Aine, J. Chen, and S-M Kang, "Development of a wide tuning range MEMS tunable capacitor for wireless communication systems," Proc. IEDM, pp. 403-406, December 10-13, 2000.
10. M. Barbic, J.J. Mock, A.P. Gray, and S. Schultz, "Electromagnetic micromotor for microfluidics applications," Applied Physics Letters, 79(9), 1399-1401 (2001).