Monolithic integration of 3-D electroplated microstructures with unlimited number of levels using planarization with a sacrificial metallic mold (PSMM)

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 624-629

  Yoon, Jun Bo ^a   Han, Chul Hi ^a   Yoon, Euisik ^a   Kim, Choong Ki ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC INDUCTORS; ELECTROPLATED PRODUCTS; MONOLITHIC INTEGRATED CIRCUITS;

ELECTROPLATED MICROSTRUCTURES; PLANARIZATION WITH SACRIFICIAL METALLIC MOLD (PSMM);

MICROELECTROMECHANICAL DEVICES;

EID: 0032675869     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (17)