A high-aspect-ratio comb actuator using UV-LIGA surface micromachining and (110) silicon bulk micromachining

Journal of Micromechanics and Microengineering

Volumn 12, Issue 2, 2002, Pages 128-135

  Kim, Seong Hyok ^a   Lee, Sang Hun ^b   Kim, Yong Kweon ^a  

^a Seoul National University   (South Korea)

^b Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; ASPECT RATIO; CALCULATIONS; ETCHING; MICROMACHINING; NATURAL FREQUENCIES; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES; SURFACES;

FREQUENCY MATCHING; SILICON BULK MICROMACHINING; SURFACE MICROMACHINING;

MICROACTUATORS;

EID: 0036466267     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/12/2/306     Document Type: Article

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