Development of a wide tuning range MEMS tunable capacitor for wireless communication systems

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 2000, Pages 403-406

  Zou, J ^a   Liu, C ^a   Schutt Aine, J ^a   Chen, J ^a   Kang, S M ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTROSTATIC ACTUATORS; INTEGRATED CIRCUIT MANUFACTURE; MICROELECTROMECHANICAL DEVICES; TUNING; WIRELESS TELECOMMUNICATION SYSTEMS;

PARALLEL-PLATE TUNABLE CAPACITORS;

CAPACITORS;

EID: 0034452628     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. A low-noise RF voltage-controlled oscillator using on-chip high-Q three dimensional coil inductor and micromachined variable capacitor
2. Monolithic high-performance three-dimensional coil inductors for wireless communication applications
3. A micromachined variable capacitor for monolithic low-noise VCOs
4. Micromachined varactors with wide tuning range
5. High tuning ratio MEMS based tunable capacitors for RF communications applications
6. MEMS-based variable capacitor for millimeter-wave applications