A high-performance MEMS transformer for silicon RF ICS

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 653-656

  Choi, Yun Seok ^a   Yoon, Jun Bo ^a   Kim, Byeong Il ^a   Yoon, Euisik ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC INSTRUMENT TRANSFORMERS; ELECTRIC RESISTANCE MEASUREMENT; EQUIVALENT CIRCUITS; INSERTION LOSSES; INTEGRATED CIRCUIT MANUFACTURE; MICROMACHINING; RADIO FREQUENCY AMPLIFIERS;

MICROELECTROMECHANICAL TRANSFORMER; RADIO FREQUENCY INTEGRATED CIRCUITS; SILICON INTEGRATED CIRCUITS; SPIRAL TYPE SUSPENDED TRANSFORMER;

MICROELECTROMECHANICAL DEVICES;

EID: 0036122172     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

1. Monolithic high-Q overhang inductors fabricated on silicon and glass substrates
2. Monolithic transformer for silicon RF IC design
3. Integrated passive components in MCM-Si technology and their application in RF-systems
4. Monolithic transformers and their application in a differential CMOS RF low-noise amplifier
5. Analysis, design, and optimization of spiral inductors and transformers for Si RF IC's
6. Lateral microwave transformers and inductors implemented in a Si/SiGe HBT Process
7. Monolithic integration of 3-D electoplated microstructures of unlimited number of levels using planarization with a sacrificial metallic mold (PSMM)
8. Systematic analysis and modeling of integrated inductors and transformers in RF IC design
9. Surface micromachined solenoid inductors for high frequency applications
10. The power transfer mechanism of MMIC spiral transformers and adjacent spiral inductors