On the suppression of hydrogen degradation in Pb Zr 0.4 Ti 0.6 O 3 ferroelectric capacitors with Pt O x top electrode

Journal of Applied Physics

Volumn 98, Issue 10, 2005, Pages

  Huang, Chun Kai ^a   Chang, Che Hao ^a   Wu, Tai Bor ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

FERROELECTRIC CAPACITORS; SCHOTTKY BARRIERS;

CATALYSIS; DEGRADATION; FERROELECTRIC MATERIALS; HYDROGEN; SECONDARY ION MASS SPECTROMETRY;

LEAD COMPOUNDS;

EID: 28644446938     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2126121     Document Type: Article

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