The effects of the catalytic nature of capacitor electrodes on the degradation of ferroelectric Pb(Zr,Ti)O3 thin films during reductive ambient annealing

Journal of Applied Physics

Volumn 82, Issue 1, 1997, Pages 341-344

  Fujisaki, Yoshihisa ^a   Kushida Abdelghafar, Keiko ^a   Shimamoto, Yasuhiro ^a   Miki, Hiroshi ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CAPACITORS; CATALYSIS; DEGRADATION; ELECTRODES; FERROELECTRIC MATERIALS; FERROELECTRICITY; HYDROGEN; OXIDATION; OXIDES; PLATINUM;

PLATINUM ELECTRODES; REDUCTIVE AMBIENCE;

THIN FILMS;

EID: 0031192210     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.365818     Document Type: Article

References (14)

1. N. Tanabe, T. Matsuki, S. Saitoh, T. Takeuchi, S. Kobayashi, T. Nakajima, Y. Maejima, Y. Hayashi, K. Amanuma, T. Hase, Y. Miyasaka, and T. Kunio, 1995 Symposium on VLSI Technical Digest of Technical Papers (1995), p. 123.
2. H. Koike, 1996 IEEE International Solid-State Circuits Conference Tech. Digest (1996), p. 368.
3. S. Onishi, Tech. Dig. Int. Electron Devices Meeting (1994), p. 843.
4. K. Torii, H. Kawakami, H. Miki, K. Kushida, M. Itoga, Y. Goto, T. Kumihashi, N. Yokoyama, M. Moniwa, K. Shoji, T. Kaga, and Y. Fujisaki, Integr. Ferroelectr. 16, 21 (1997).
5. K. Shoji, M. Moniwa, H. Yamashita, T. Kisu, T. Kaga, K. Torii, T. Kumihashi, T. Morimoto, H. Kawakami, Y. Gotoh, T. Itoga, N. Yokoyama, T. Kure, M. Ohkura, Y. Fujisaki, K. Sakata, and K. Kimura, 1996 Symposium on VLSI Technical Digest of Technical Papers (1996), p. 28.
6. R. Khamankar, J. Kim, B. Jiang, C. Sudhama, P. Maniar, R. Moazzami, R. Jones, and J. Lee, Tech. Dig. Int. Electron Devices Meet. 12, 337 (1994).
7. K. Kushida-Abdelghafar, H. Miki, K. Torii, and Y. Fujisaki, Appl. Phys. Lett. 69, 3188 (1996).
8. D. Dimos, W. L. Warren, M. B. Sinclair, B. A. Tuttle, and R. W. Schwartz, J. Appl. Phys. 76, 4305 (1994).
9. W. D. Gillespie, R. K. Herz, E. E. Peterson, and G. A. Somorjai, J. Catal. 70, 147 (1981).
10. K. Christmann, G. Ertl, and T. Pignet, Surf. Sci. 54, 365 (1976).
11. T. L. Barr, J. Phys. Chem. 82, 1801 (1978).
12. H. Nakatsuji, Y. Matsuzaki, and T. Yonezawa, J. Chem. Phys. 88, 5759 (1988).
13. D. Briggs and M. P. Seah, Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy (Wiley, Sussex, 1983).
14. K. S. Kim, N. Winograd, and R. E. Davis, J. Am. Chem. Soc. 93, 6296 (1971).