H2 damage of ferroelectric Pb(Zr,Ti)O3 thin-film capacitors - The role of catalytic and adsorptive activity of the top electrode

Applied Physics Letters

Volumn 70, Issue 23, 1997, Pages 3096-3097

  Shimamoto, Y ^a   Kushida Abdelghafar, K ^a   Miki, H ^a   Fujisaki, Y ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000192175     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.119102     Document Type: Article

References (4)

1. T. Mihara, H. Watanabe, and C. A. P. de Araujo, Jpn. J. Appl. Phys. 1 33, 5281 (1994).
2. K. Kushida-Abdelghafar, H. Miki, K. Torii, and Y. Fujisaki, Appl. Phys. Lett. 69, 3188 (1996).
3. V. F. Kiselv and O. V. Krylov, Adsorption and Catalysis on Transition Metals and Their Oxides, Springer Series on Surface Sciences, Vol. 9 (Springer, New York, 1989).
4. A. K. Tagantsev, M. Landivar, E. Colla, and N. Setteri, J. Appl. Phys. 78, 2623 (1995).