Improved fatigue properties of lead zirconate titanate films made on oxygen-implanted platinum electrodes

Thin Solid Films

Volumn 460, Issue 1-2, 2004, Pages 25-29

  Chen, Yi Chan ^a   Sun, Yu Ming ^a   Gan, Jon Yiew ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Ferroelectric properties; Grazing incident X ray diffractometer; Oxygen implanted Pt electrode; X Ray photoelectron spectroscopy

Indexed keywords

ANNEALING; ELECTRODES; FATIGUE OF MATERIALS; FERROELECTRICITY; ION IMPLANTATION; OXYGEN; PLATINUM; THIN FILMS; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

FERROELECTRIC PROPERTIES; GRAZING-INCIDENT X-RAY DIFFRACTOMETERS; OXYGEN-IMPLANTED PT ELECTRODES;

LEAD COMPOUNDS;

EID: 2942620529     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.01.056     Document Type: Article

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