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Defect and Diffusion Forum

Volumn 242-244, Issue , 2005, Pages 169-184

Germanium in Czochralski silicon

(2) Yang, Deren a Chen, Jiahe a

a ZHEJIANG UNIVERSITY (China)

Author keywords

Germanium Doping; Mechanical Strength; Oxygen Precipitation; Silicon; Voids

Indexed keywords

CRYSTAL LATTICES; CRYSTALS; DOPING (ADDITIVES); OXYGEN; PRECIPITATION (CHEMICAL); SILICON; STRENGTH OF MATERIALS;

GERMANIUM DOPING; OXYGEN PRECIPITATION; VOIDS;

IMPURITIES;

EID: 26044478171 PISSN: 10120386 EISSN: 16629507 Source Type: Journal
DOI: 10.4028/www.scientific.net/ddf.242-244.169 Document Type: Review

Times cited : (10)

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