Microstructure and dielectric properties of textured SrTiO 3 thin films

Journal of the American Ceramic Society

Volumn 88, Issue 4, 2005, Pages 789-801

  Schmidt, Steffen ^a,b   Lu, Jiwei ^a,c,d   Keane, Sean P ^a   Bregante, Lia D ^a,e   Klenov, Dmitri O ^a,e   Stemmer, Susanne ^a  

^a University of California   (United States)

^b German Physical Society   (Germany)

^c AMERICAN CERAMIC SOCIETY   (United States)

^d Materials Research Society   (United States)

^e UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FILM STRESS; INTERFACIAL LAYERS; PT ELECTRODES; RADIO-FREQUENCY MAGNETRON SPUTTERING;

DIELECTRIC FILMS; MAGNETRON SPUTTERING; MICROSTRUCTURE; PLATINUM; STRONTIUM COMPOUNDS; TEXTURES; THIN FILMS;

CERAMIC MATERIALS;

EID: 25144434732     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1551-2916.2005.00195.x     Document Type: Article

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