Growth and microstructural stability of epitaxial Al films on (0001) α-Al2O3 substrates

Acta Materialia

Volumn 50, Issue 20, 2002, Pages 5021-5032

  Dehm, G ^a   Inkson, B J ^b   Wagner, T ^a  

^a MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS   (Germany)

^b UNIVERSITY OF OXFORD   (United Kingdom)

Author keywords

Al sapphire; Heteroepitaxy; Thermal stress; Thin films; Twin boundary

Indexed keywords

ALUMINA; EPITAXIAL GROWTH; MAGNETRON SPUTTERING; METALLOGRAPHIC MICROSTRUCTURE; THERMODYNAMIC STABILITY;

MICROSTRUCTURAL STABILITY;

METALLIC FILMS;

EID: 0037016017     PISSN: 13596454     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1359-6454(02)00347-6     Document Type: Article

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