SCOPUS 정보 검색 플랫폼

Journal of Photopolymer Science and Technology

Volumn 18, Issue 3, 2005, Pages 355-364

Characterization and lithographic performance of silsesquioxane 193 nm bilayer resists

(8) Ito, Hiroshi a Truong, Hoa D a Burns, Scan D b Pfeiffer, Dirk b Huang, Wu Song c Khojasteh, Mahmoud M c Varanasi, P Rao c Lercel, Mike b,c

a IBM ALMADEN RESEARCH CENTER (United States)

b IBM T J WATSON RESEARCH CENTER (United States)

c IBM MICROELECTRONICS (United States)

Author keywords

193 nm lithography; Bilayer resists; Chemical amplification; Deprotection; Dissolution kinetics; Fluoroalcohol; Hydrogen bonding; Quartz crystal microbalance; Silanol condensation

Indexed keywords

EID: 22144470163 PISSN: 09149244 EISSN: None Source Type: Journal
DOI: 10.2494/photopolymer.18.355 Document Type: Article

Times cited : (6)

References (41)

1
- 0000817374
- a) G. M. Wallraff, C. E. Larson, R. Sooriyakumaran, J. Opitz, D. Fenzel-Alexander, R. DiPietro, D. Hofer, G. Breyta, M. Sherwood, J. Meute, Q. Lin, J. Simons, K. Babich, K. Pelrillo, and M. Angelopoulos, J. Photopolym. Sci. Technol. 11 (1998) 673;
- (1998) J. Photopolym. Sci. Technol. , vol.11 , pp. 673
- Wallraff, G.M.¹ Larson, C.E.² Sooriyakumaran, R.³ Opitz, J.⁴ Fenzel-Alexander, D.⁵ DiPietro, R.⁶ Hofer, D.⁷ Breyta, G.⁸ Sherwood, M.⁹ Meute, J.¹⁰ Lin, Q.¹¹ Simons, J.¹² Babich, K.¹³ Pelrillo, K.¹⁴ Angelopoulos, M.¹⁵

2
- 20244389276
- b) G. M. Wallraff, C. E. Larson, R. Sooriyakumaran, J. Opitz, D. Fenzel-Alexander, R. DiPietro, D. C. Hofer, M. Sherwood, J. Meute, D. LaTulipe, J. Simons, D. Seeger, K. Petrillo, M. Angelopoulos, Q. Lin, and C.Fairchok, Proc. of 11th International Conference on Photopolymers (1997) 102;
- (1997) Proc. of 11th International Conference on Photopolymers , pp. 102
- Wallraff, G.M.¹ Larson, C.E.² Sooriyakumaran, R.³ Opitz, J.⁴ Fenzel-Alexander, D.⁵ DiPietro, R.⁶ Hofer, D.C.⁷ Sherwood, M.⁸ Meute, J.⁹ LaTulipe, D.¹⁰ Simons, J.¹¹ Seeger, D.¹² Petrillo, K.¹³ Angelopoulos, M.¹⁴ Lin, Q.¹⁵ Fairchok, C.¹⁶

3
- 0000582196
- c) R. Sooriyakumaran, G. M. Wallraff, C. E. Larson, D. Fenzel-Alexander, R. A. DiPietro, J. Opitz, D. C. Hofer, D. C. LaTulipe, Jr., J. P. Simons, K., E. Petrillo, K. Babich, M. Angelopoulos, Q. Lin, and A. D. Katnani, Proc. SPIE 3333 (1998) 219;
- (1998) Proc. SPIE , vol.3333 , pp. 219
- Sooriyakumaran, R.¹ Wallraff, G.M.² Larson, C.E.³ Fenzel-Alexander, D.⁴ DiPietro, R.A.⁵ Opitz, J.⁶ Hofer, D.C.⁷ LaTulipe Jr., D.C.⁸ Simons, J.P.⁹ Petrillo, K.E.¹⁰ Babich, K.¹¹ Angelopoulos, M.¹² Lin, Q.¹³ Katnani, A.D.¹⁴

4
- 0032631908
- d) Q. Lin, K. Petrillo, K. Babich, D. LaTulipe, D. Medeiros, A. Mahorowala, J. Simons, M. Angelopoulos, G. Wallraff, C. Larson, D. Fenzel-Alexander, R. Sooriyakumaran, G. Breyta, P. Brock, R. DiPietro, and D. Hofer, Proc. SPIE 3678 (1999) 241.
- (1999) Proc. SPIE , vol.3678 , pp. 241
- Lin, Q.¹ Petrillo, K.² Babich, K.³ LaTulipe, D.⁴ Medeiros, D.⁵ Mahorowala, A.⁶ Simons, J.⁷ Angelopoulos, M.⁸ Wallraff, G.⁹ Larson, C.¹⁰ Fenzel-Alexander, D.¹¹ Sooriyakumaran, R.¹² Breyta, G.¹³ Brock, P.¹⁴ DiPietro, R.¹⁵ Hofer, D.¹⁶

5
- 0020884028
- J. M. Shaw, M. Hatzakis, J. Paraszczak, J. Liutkus, and E. Babich, Polym. Eng. Sci. 23 (1983) 1054.
- (1983) Polym. Eng. Sci. , vol.23 , pp. 1054
- Shaw, J.M.¹ Hatzakis, M.² Paraszczak, J.³ Liutkus, J.⁴ Babich, E.⁵

6
- 17144368056
- H. Ito, Adv. Polym. Sci. 172 (2005) 37.
- (2005) Adv. Polym. Sci. , vol.172 , pp. 37
- Ito, H.¹

7
- 0020898424
- S. A. MacDonald, H. Ito, and C. G. Willson, Microelectron. Eng. 1 (1983) 269.
- (1983) Microelectron. Eng. , vol.1 , pp. 269
- MacDonald, S.A.¹ Ito, H.² Willson, C.G.³

8
- 0021937189
- Y. Ohnishi, M. Suzuki, K. Saigo, Y. Saotome, and H. Gokan, Proc. SPIE 539 (1985) 62.
- (1985) Proc. SPIE , vol.539 , pp. 62
- Ohnishi, Y.¹ Suzuki, M.² Saigo, K.³ Saotome, Y.⁴ Gokan, H.⁵

9
- 0029765947
- U. Schaedeli, E. Tinguely, A. J. Blakeney, P. Falcigno, and R. Kunz, Proc. SPIE 2724 (1996) 344.
- (1996) Proc. SPIE , vol.2724 , pp. 344
- Schaedeli, U.¹ Tinguely, E.² Blakeney, A.J.³ Falcigno, P.⁴ Kunz, R.⁵

10
- 20244377269
- D. White, T. Steinhäusler, A. J. Blakeney, A. H. Gabor, B. T. Beauchemin, Jr., W. R. Deady, J. Jarmalowicz, R. R. Kunz, K. R. Dean, G. K. Rich, and D. Stark, Proc. 11th International Conference on Photopolymers (1997) 84.
- (1997) Proc. 11th International Conference on Photopolymers , pp. 84
- White, D.¹ Steinhäusler, T.² Blakeney, A.J.³ Gabor, A.H.⁴ Beauchemin Jr., B.T.⁵ Deady, W.R.⁶ Jarmalowicz, J.⁷ Kunz, R.R.⁸ Dean, K.R.⁹ Rich, G.K.¹⁰ Stark, D.¹¹

11
- 20244383335
- M. J. Bowden, A. H. Gabor, O. Dimov, A. N. Medina, P. Foster, T. Steinhäusler, J. J. Biafore, G. Spaziano, S. G. Slater, A. J. Blakeney, M. O. Neisser, F. M. Houlihan, R. A. Cirelli, G. Dabbagh, R. S. Hutton, I., L. Rushkin, J. R. Sweeney, A. G. Timko, O. Nalamasu, and E. Reichmanis, J. Photopolym. Sci. Technol. 12 (1999) 423.
- (1999) J. Photopolym. Sci. Technol. , vol.12 , pp. 423
- Bowden, M.J.¹ Gabor, A.H.² Dimov, O.³ Medina, A.N.⁴ Foster, P.⁵ Steinhäusler, T.⁶ Biafore, J.J.⁷ Spaziano, G.⁸ Slater, S.G.⁹ Blakeney, A.J.¹⁰ Neisser, M.O.¹¹ Houlihan, F.M.¹² Cirelli, R.A.¹³ Dabbagh, G.¹⁴ Hutton, R.S.¹⁵ Rushkin, I.L.¹⁶ Sweeney, J.R.¹⁷ Timko, A.G.¹⁸ Nalamasu, O.¹⁹ Reichmanis, E.²⁰ more..

12
- 0010240999
- A. M. Goethals, P. Jaenen, I. Pollers, F. Van Roey, K. Ronse, B. Heskamp, and G. Davies, J. Photopolym. Sci. Technol. 12 (1999) 445.
- (1999) J. Photopolym. Sci. Technol. , vol.12 , pp. 445
- Goethals, A.M.¹ Jaenen, P.² Pollers, I.³ Van Roey, F.⁴ Ronse, K.⁵ Heskamp, B.⁶ Davies, G.⁷

13
- 0000115942
- Y.-J. Kang, H. Lee, E.-R. Kim, S.-J. Choi, and C.-G. Park, J. Photopolym. Sci. Technol. 10 (1997) 585.
- (1997) J. Photopolym. Sci. Technol. , vol.10 , pp. 585
- Kang, Y.-J.¹ Lee, H.² Kim, E.-R.³ Choi, S.-J.⁴ Park, C.-G.⁵

14
- 0032651668
- J. B. Kim, H. Kim, S. H. Lee, S. J. Choi, J. T. Moon, Proc. SPIE 3678 (1999) 420.
- (1999) Proc. SPIE , vol.3678 , pp. 420
- Kim, J.B.¹ Kim, H.² Lee, S.H.³ Choi, S.J.⁴ Moon, J.T.⁵

15
- 0032675482
- P. Foster, T. Steinhausler, J. J. Biafore, G. Spaziano, S. G. Slater, and A. J. Blakeney, Proc. SPIE 3678 (1999) 1034.
- (1999) Proc. SPIE , vol.3678 , pp. 1034
- Foster, P.¹ Steinhausler, T.² Biafore, J.J.³ Spaziano, G.⁴ Slater, S.G.⁵ Blakeney, A.J.⁶

16
- 0000847419
- a) R. Sooriyakumaran, D. Fenzel-Alexander, P. J. Brock, C. E. Larson, R. A. DiPietro, G. M. Wallraff, D. C. Hofer, D. J. Dawson, A. P. Mahorowala, and M. Angelopoulos, Proc. SPIE 3999 (2000) 1171;
- (2000) Proc. SPIE , vol.3999 , pp. 1171
- Sooriyakumaran, R.¹ Fenzel-Alexander, D.² Brock, P.J.³ Larson, C.E.⁴ DiPietro, R.A.⁵ Wallraff, G.M.⁶ Hofer, D.C.⁷ Dawson, D.J.⁸ Mahorowala, A.P.⁹ Angelopoulos, M.¹⁰

17
- 0034755502
- b) R. Kwong, P. R. Varanasi, M. Lawson, T. Hughes, G. Jordhamo, M. Khojasteh, A. Mahorowala, R. Sooriyakumaran, P. Brock, C. Larson, D. Fenzel-Alexander, H. Truong, and R. Allen, Proc. SPIE 4345 (2001) 50.
- (2001) Proc. SPIE , vol.4345 , pp. 50
- Kwong, R.¹ Varanasi, P.R.² Lawson, M.³ Hughes, T.⁴ Jordhamo, G.⁵ Khojasteh, M.⁶ Mahorowala, A.⁷ Sooriyakumaran, R.⁸ Brock, P.⁹ Larson, C.¹⁰ Fenzel-Alexander, D.¹¹ Truong, H.¹² Allen, R.¹³

18
- 2342628989
- R. Kwong, M. Khojasteh, P. Lawson, T. Hughes, P. R. Varanasi, B. Brunsvold, R. Allen, P. Brock, R. Sooriyakumaran, H. Truong, A. Mahorowala, and D. Medeiros, Proc. SPIE 4690 (2002) 403.
- (2002) Proc. SPIE , vol.4690 , pp. 403
- Kwong, R.¹ Khojasteh, M.² Lawson, P.³ Hughes, T.⁴ Varanasi, P.R.⁵ Brunsvold, B.⁶ Allen, R.⁷ Brock, P.⁸ Sooriyakumaran, R.⁹ Truong, H.¹⁰ Mahorowala, A.¹¹ Medeiros, D.¹²

19
- 0035747311
- T. S. Jean, T. T. Song, W. T. Jiaang, J. F. Chang, H. B. Cheng, C. S. Chuang, and T. Y. Lin, J. Photopolym. Sci. Technol. 14 (2001) 503.
- (2001) J. Photopolym. Sci. Technol. , vol.14 , pp. 503
- Jean, T.S.¹ Song, T.T.² Jiaang, W.T.³ Chang, J.F.⁴ Cheng, H.B.⁵ Chuang, C.S.⁶ Lin, T.Y.⁷

20
- 0000363030
- S. Hien, G. Czech, W.-D. Domke, H. Raske, M. Sebald, and I. Stiebert, Proc. SPIE 3333 (1998) 154.
- (1998) Proc. SPIE , vol.3333 , pp. 154
- Hien, S.¹ Czech, G.² Domke, W.-D.³ Raske, H.⁴ Sebald, M.⁵ Stiebert, I.⁶

21
- 3142543245
- J. Hatakeyama, T. Takeda, M. Nakashima, T. Kinsho, Y. Kawai, and T. Ishihara, J. Photopolym. Sci. Technol. 17 (2004) 519.
- (2004) J. Photopolym. Sci. Technol. , vol.17 , pp. 519
- Hatakeyama, J.¹ Takeda, T.² Nakashima, M.³ Kinsho, T.⁴ Kawai, Y.⁵ Ishihara, T.⁶

22
- 85015541039
- M. Sakata, T. Ito, M. Kosuge, and Y. Yamashita, J. Photopolym. Sci. Technol. 5 (1992) 181.
- (1992) J. Photopolym. Sci. Technol. , vol.5 , pp. 181
- Sakata, M.¹ Ito, T.² Kosuge, M.³ Yamashita, Y.⁴

23
- 17144407089
- M. Sakata, M. Kosuge, T. Ito, and Y. Yamashita, J. Photopolym. Sci. Technol. 4 (1991) 75.
- (1991) J. Photopolym. Sci. Technol. , vol.4 , pp. 75
- Sakata, M.¹ Kosuge, M.² Ito, T.³ Yamashita, Y.⁴

24
- 17144422694
- Y. Kawai, A. Tanaka, H. Ban, J. Nakamura, and T. Matsuda, J. Photopolym. Sci. Technol. 5 (1992) 431.
- (1992) J. Photopolym. Sci. Technol. , vol.5 , pp. 431
- Kawai, Y.¹ Tanaka, A.² Ban, H.³ Nakamura, J.⁴ Matsuda, T.⁵

25
- 85075996432
- W. Brunsvold, K. Stewart, P. Jaganathan, R. Sooriyakumaran, J. Parrill, K. P. Muller, H. Sachdev, Proc. SPIE 1925 (1993) 377.
- (1993) Proc. SPIE , vol.1925 , pp. 377
- Brunsvold, W.¹ Stewart, K.² Jaganathan, P.³ Sooriyakumaran, R.⁴ Parrill, J.⁵ Muller, K.P.⁶ Sachdev, H.⁷

26
- 0001415175
- a) Q. Lin, A. Katnani, T. Brunner, C. DeWan, C. Fairchok, D. LaTulipe, J. Simons, K. Petrillo, K. Babich, R. Sooriyakumaran, G. Wallraff, D. and Hofer, Proc. SPIE 3333 (1998) 278;
- (1998) Proc. SPIE , vol.3333 , pp. 278
- Lin, Q.¹ Katnani, A.² Brunner, T.³ DeWan, C.⁴ Fairchok, C.⁵ LaTulipe, D.⁶ Simons, J.⁷ Petrillo, K.⁸ Babich, K.⁹ Sooriyakumaran, R.¹⁰ Wallraff, G.¹¹ Hofer, D.¹²

27
- 0000817374
- b) G. M. Wallraff, C. E. Larson, R. Sooriyakumaran, J. Opitz, D. Fenzel-Alexander, R. DiPietro, D. Hofer, G. Breyta, M. Sherwood, J. Meute, Q. Lin, J. Simons, K. Babich, K. Petrillo, and M. Angelopoulos, J. Photopolym. Sci. Technol. 11 (1998)673.
- (1998) J. Photopolym. Sci. Technol. , vol.11 , pp. 673
- Wallraff, G.M.¹ Larson, C.E.² Sooriyakumaran, R.³ Opitz, J.⁴ Fenzel-Alexander, D.⁵ DiPietro, R.⁶ Hofer, D.⁷ Breyta, G.⁸ Sherwood, M.⁹ Meute, J.¹⁰ Lin, Q.¹¹ Simons, J.¹² Babich, K.¹³ Petrillo, K.¹⁴ Angelopoulos, M.¹⁵

28
- 0010250711
- T. Morisawa, N. Matsuzawa, S. Mori, Y. Kaimoto, M. Endo, T. Ohfuji, K. Kuhara, and M. Sasago, J. Photopolym. Sci. Technol. 10 (1997) 589.
- (1997) J. Photopolym. Sci. Technol. , vol.10 , pp. 589
- Morisawa, T.¹ Matsuzawa, N.² Mori, S.³ Kaimoto, Y.⁴ Endo, M.⁵ Ohfuji, T.⁶ Kuhara, K.⁷ Sasago, M.⁸

29
- 0004044662
- J. Hatakeyama, M. Nakashima, I. Kaneko, S. Nagura, T. Ishihara, Proc. SPIE 3333, 62, 1998.
- (1962) Proc. SPIE , vol.3333 , pp. 1998
- Hatakeyama, J.¹ Nakashima, M.² Kaneko, I.³ Nagura, S.⁴ Ishihara, T.⁵

30
- 0000360322
- T. Morisawa, N. Matsuzawa, S. Mon, Y. Kaimoto, M. Endo, T. Ohfuji, K. Kuhara, and M. Sasago, J. Photopolym. Sci. Technol. 11 (1998) 667.
- (1998) J. Photopolym. Sci. Technol. , vol.11 , pp. 667
- Morisawa, T.¹ Matsuzawa, N.² Mon, S.³ Kaimoto, Y.⁴ Endo, M.⁵ Ohfuji, T.⁶ Kuhara, K.⁷ Sasago, M.⁸

31
- 0041717638
- Y. Namba, H. Takahashi, J. Photopolym. Sci. Technol. 11, 663, 1998.
- (1998) J. Photopolym. Sci. Technol. , vol.11 , pp. 663
- Namba, Y.¹ Takahashi, H.²

32
- 0034762602
- R. Sooriyakumara, D. Fenzel-Alexander, N. Fender, G. M. Wallraff, and R. D. Allen, Proc. SPIE 4345 (2001) 319.
- (2001) Proc. SPIE , vol.4345 , pp. 319
- Sooriyakumara, R.¹ Fenzel-Alexander, D.² Fender, N.³ Wallraff, G.M.⁴ Allen, R.D.⁵

33
- 17144363420
- H. Ito, M. Khojasteh, W. Li, eds., Society of Plastics Engineers, Mid-Hudson Section, Hopewell Junction, NY
- T. Fujigaya, Y. Shibasaki, M. Ueda, S. Kishimura, M. Endo, and M. Sasago, in Forefront of Lithographic Materials Research H. Ito, M. Khojasteh, W. Li, eds., Society of Plastics Engineers, Mid-Hudson Section, Hopewell Junction, NY, (2001) 219.
- (2001) Forefront of Lithographic Materials Research , pp. 219
- Fujigaya, T.¹ Shibasaki, Y.² Ueda, M.³ Kishimura, S.⁴ Endo, M.⁵ Sasago, M.⁶

34
- 85046911061
- R. J. Hung, M. Yamachika, T. Chiba, H. Iwasawa, A Hayashi, N. Yamahara, and T. Shimokawa, J. Photopolym. Sci. Technol. 15 (2002) 693.
- (2002) J. Photopolym. Sci. Technol. , vol.15 , pp. 693
- Hung, R.J.¹ Yamachika, M.² Chiba, T.³ Iwasawa, H.⁴ Hayashi, A.⁵ Yamahara, N.⁶ Shimokawa, T.⁷

35
- 0141611764
- J. Hong, H.-W. Kim, S.-H. Lee, S.-G. Woo, H. Cho, and W.-S. Han, Proc. SPIE 5039 (2003) 249.
- (2003) Proc. SPIE , vol.5039 , pp. 249
- Hong, J.¹ Kim, H.-W.² Lee, S.-H.³ Woo, S.-G.⁴ Cho, H.⁵ Han, W.-S.⁶

36
- 0141499948
- G. Barclay, S. Kanagasabapathy, G. Pohlers, J. Mattia, K. Xiong, S. Ablaza, J. Cameron, A. Zampini, T. Zhang, S. Yamada, F. Huby, and K. Wiley, Proc. SPIE 5039, 433, 2003.
- (2003) Proc. SPIE , vol.5039 , pp. 433
- Barclay, G.¹ Kanagasabapathy, S.² Pohlers, G.³ Mattia, J.⁴ Xiong, K.⁵ Ablaza, S.⁶ Cameron, J.⁷ Zampini, A.⁸ Zhang, T.⁹ Yamada, S.¹⁰ Huby, F.¹¹ Wiley, K.¹²

37
- 0040707402
- R. R. Kunz and D. K. Downs, J. Vac. Sci. Technol. B17 (1999) 3330.
- (1999) J. Vac. Sci. Technol. , vol.B17 , pp. 3330
- Kunz, R.R.¹ Downs, D.K.²

38
- 0141834847
- W. Li, P. R. Varanasi, M. C. Lawson, R. W. Kwong, K.-J. Chen, H. Ito, H. Truong, R. D. Alien, M. Yamamoto, E. Kobayashi, and M. Slezak, Proc. SPIE 5039 (2003) 61.
- (2003) Proc. SPIE , vol.5039 , pp. 61
- Li, W.¹ Varanasi, P.R.² Lawson, M.C.³ Kwong, R.W.⁴ Chen, K.-J.⁵ Ito, H.⁶ Truong, H.⁷ Alien, R.D.⁸ Yamamoto, M.⁹ Kobayashi, E.¹⁰ Slezak, M.¹¹

39
- 0041913068
- "Micro- and Nano-Patterning Polymers," H. Ito, E. Reichmanis, O. Nalamasu, and T. Ueno, Eds., American Chemical Society, Washington, D. C., Chap. 16
- H. Ito, N. Seehof, R. Sato, T. Nakayama, and M. Ueda, in ACS Symposium Series 706, "Micro- and Nano-Patterning Polymers," H. Ito, E. Reichmanis, O. Nalamasu, and T. Ueno, Eds., American Chemical Society, Washington, D. C., Chap. 16 (1998) 208.
- (1998) ACS Symposium Series , vol.706 , pp. 208
- Ito, H.¹ Seehof, N.² Sato, R.³ Nakayama, T.⁴ Ueda, M.⁵

40
- 3843097041
- C. E. Larson, G. M. Wallraff, Proc. SPIE 5376 (2004) 1165.
- (2004) Proc. SPIE , vol.5376 , pp. 1165
- Larson, C.E.¹ Wallraff, G.M.²

41
- 3142653676
- H. Ito, H. D. Truong, L. F. Rhodes, C. Chang, L. J. Langsdorf, H. A. Sidaway, K. Maeda, and S. Sumida, J. Photopolym. Sci. Technol. 17 (2004) 609.
- (2004) J. Photopolym. Sci. Technol. , vol.17 , pp. 609
- Ito, H.¹ Truong, H.D.² Rhodes, L.F.³ Chang, C.⁴ Langsdorf, L.J.⁵ Sidaway, H.A.⁶ Maeda, K.⁷ Sumida, S.⁸

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.