Optical second harmonic generation studies of ultrathin high-k dielectric stacks

Journal of Applied Physics

Volumn 97, Issue 8, 2005, Pages

  Fomenko, V ^a   Gusev, E P ^b   Borguet, E ^c  

^a UNIVERSITY OF COLORADO   (United States)

^b IBM T J WATSON RESEARCH CENTER   (United States)

^c Temple University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER DEPOSITION; DETRAPPING; OPTICAL ROUGHNESS; THIN METALS;

ANISOTROPY; CHARGE TRANSFER; ELECTRIC VARIABLES MEASUREMENT; INTERFACES (MATERIALS); LEAKAGE CURRENTS; LIGHT TRANSMISSION; SECOND HARMONIC GENERATION; SILICA;

DIELECTRIC FILMS;

EID: 21444447325     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1861146     Document Type: Article

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