Fabrication and characterization of 1-dimensionai and 2-dimensional capacitive micromachined ultrasonic transducer (CMUT) arrays for 2-dimensional and volumetric ultrasonic imaging

Oceans Conference Record (IEEE)

Volumn 4, Issue , 2002, Pages 2361-2367

  Ergun, A S ^a   Cheng, C H ^a   Demirci, U ^a   Khuri Yakub, B T ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC ARRAYS; BANDWIDTH; CAPACITANCE; FREQUENCIES; ULTRASONIC IMAGING;

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS (CMUT);

ULTRASONIC TRANSDUCERS;

EID: 0037969102     PISSN: 01977385     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)

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