Mechanical behavior of an electrostatically actuated micropump

Collection of Technical Papers - AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics and Materials Conference

Volumn 2, Issue , 2002, Pages 803-809

  Faris, Waleed F ^a   Abdel Rahman, Eihab M ^a   Nayfeh, Ali H ^a  

^a VIRGINIA STATE UNIVERSITY   (United States)

Author keywords

Annular plates; Electrostatic actuation; Micropump dynamics

Indexed keywords

BOUNDARY VALUE PROBLEMS; DEFLECTION (STRUCTURES); EIGENVALUES AND EIGENFUNCTIONS; ELECTRIC POTENTIAL; ELECTROSTATIC ACTUATORS; PLATES (STRUCTURAL COMPONENTS); PUMPS; VIBRATIONS (MECHANICAL);

MICROPUMPS;

MICROELECTROMECHANICAL DEVICES;

EID: 0036073020     PISSN: 02734508     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.2514/6.2002-1303     Document Type: Conference Paper

References (8)

1. Review of the technology of micropumps
2. Normalized abacus for the global behavior of diaphragms: Pneumatic, electrostatic, piezoelectric or electromagnetic actuation
3. Analytical modeling of electrostatic membrane actuator for micropumps
4. Dynamic analysis of an electrostatic micropump
5. Micro-turbo-generator design and fabrication: A preliminary study
6. 2/Si membranes with various geometries
7. Free vibrations of annular plates coupled with fluids