A reduced-order model for electrically actuated clamped circular plates

Proceedings of the ASME Design Engineering Technical Conference

Volumn 5 C, Issue , 2003, Pages 1867-1874

  Vogl, Gregory W ^a   Nayfeh, Ali H ^a  

^a VIRGINIA POLYTECHNIC INSTITUTE AND STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; COMPUTER SIMULATION; DEFORMATION; DIFFERENTIAL EQUATIONS; ELECTROSTATICS; GALERKIN METHODS; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; PUMPS; RESIDUAL STRESSES; SILICON; STRUCTURAL DESIGN;

CIRCULAR PLATES; ISOLATING LAYERS;

PLATES (STRUCTURAL COMPONENTS);

EID: 1842683963     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/detc2003/vib-48530     Document Type: Conference Paper

References (17)

1. Français, O., and Dufour, I., 2000. "Enhancement of Elementary Displaced Volume with Electrostatically Actuated Diaphragms: Application to Electrostatic Micropumps". J. Micromech. Microeng., 10, pp. 282-286.
2. Accoto, D., Nedelcu, O. T., Carrozza, M. C., and Dario, P., 1998. "Theoretical Analysis and Experimental Testing of a Miniature Piezoelectric Pump". Proc. of IEEE International Symposium on Micromechatronics and Human Science, pp. 261-268.
3. Böhm, S., Olthuis, W., and Bergveld, P., 1999. "A Plastic Micropump Constructed with Conventional Techniques and Materials". Sensors and Actuators A, 77, pp. 223-228.
4. van de Pol, F. C. M., van Lintel, H. T. G., Elvenspoek, M., and Fluitman, J. H. J., 1990. "A Thermopneumatic Micropump Based on Micro-Engineering Techniques". Sensors and Actuators A, 21, pp. 198-202.
5. Zengerie, R., Richter, A., and Sandmaier, H., 1992. "A Micro Membrane Pump with Electrostatic Actuation". Proc. of IEEE Micro Electro Mechanical Systems, pp. 19-24.
6. Voßkämper, L. M., Lüdecke, A., Leineweber, M., and Pelz, G., 1999. "Electromechanical Modeling Beyond VHDL-AMS". Proc. of IEEE/ACM International Workshop on Behavioral Modeling and Simulation.
7. Bochobza-Degani, O., Socher, E., and Nemirovsky, Y., 2002. "On the Effect of Residual Charges on the Pullin Parameters of Electrostatic Actuators". Sensors and Actuators A, 97-98, pp. 563-568.
8. Chan, E. K., Barikipati, K., and Dutton, R. W., 1999. "Characterization of Contact Electrornechanics through Capactitance-Voltage Measurements and Simulations". J. Microelectromech. Syst., 8, pp. 208-217.
9. Osterberg, P., Yie, H., Cai, X., White, J., and Senturia, S., 1994. "Self-Consistent Simulation and Modeling of Electrostatically Deformed Diaphragms". Proc. of IEEE Micro Electro Mechanical Systems, pp. 28-32.
10. Younis, M. I., Abdel-Rahman, E. M., and Nayfeh, A. H. "A Reduced-Order Model for Electrically Actuated Microbeam-Based MEMS". J. Microelectromech. Syst, in press.
11. Hung, E. S., Yang, Y., and Senturia, S. D., 1997. "Low-Order Models for Fast Dynamical Simulation of MEMS Microstructures". Proc. of IEEE Solid State Sensors and Actuators, pp. 1101-1104.
12. Nayfeh, A. H., and Pai, P. F., 2003. Linear and Non-linear Structural Mechanics. Wiley, NY, in press.
13. Pelesko, J. A., 2001. "Multiple Solutions in Electrostatic MEMS". Fourth International Conference on Modeling and Simulation of Microsystems, pp. 290-293.
14. O'Neil, P. V., 1995. Advanced Engineering Mathematics. Brooks/Cole Publishing, CA, pp. 252, 261.
15. Osterberg, P. M., 1995. "Electrostatically Actuated Microelectromechanical Test Structures for Material Property Measurement". Ph.D. Dissertation, Mass. Instit. Tech., Cambridge, MA, pp. 24, 77, 78, 80, 87, 88, 108, 110, 127, 128.
16. Nayfeh, A. H., and Balachandran, B., 1995. Applied Nonlinear Dynamics: Analytical, Computational, and Experimental Methods. Wiley, NY, pp. 449-454.
17. Faris, W. F., Abdel-Rahman, E. M., and Nayfeh, A. H., 2002. "Mechanical Behavior of an Electrostatically Actuated Micropump". Proc. of 43rd AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics, and Materials Conference, AIAA Paper No. 2002-1303.