Surface micromachined capacitive ultrasonic immersion transducers

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 649-654

  Jin, X C ^a   Ladabaum, I ^a   Khuri Yakub, B T ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC CONDUCTIVITY OF SOLIDS; LITHOGRAPHY; MICROMACHINING; NUMERICAL ANALYSIS; PERMITTIVITY; RESIDUAL STRESSES; SEALANTS; VACUUM APPLICATIONS;

CAPACITIVE ULTRASONIC IMMERSION TRANSDUCERS; CAVITY SEALING; MEMBRANE FORMATION;

ULTRASONIC TRANSDUCERS;

EID: 0031681688     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)