Piezoelectrically actuated flextensional MUTs

Proceedings of the IEEE Ultrasonics Symposium

Volumn 2, Issue , 2001, Pages 903-906

  Perçin, Gökhan ^a   Khuri Yakub, Butrus T ^b  

^a ADEPTIENT   (United States)

^b STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; BENDING MOMENTS; ELECTRON DEVICE MANUFACTURE; EQUIVALENT CIRCUITS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; PIEZOELECTRIC TRANSDUCERS; TWO DIMENSIONAL; ULTRASONIC TRANSMISSION;

CLASSICAL THIN PLATE THEORY; MINDLIN PLATE THEORY; PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER; PLANAR SILICON MICROMACHINING;

ULTRASONIC TRANSDUCERS;

EID: 0035728828     PISSN: 10510117     EISSN: None     Source Type: Journal    
DOI: 10.1109/ULTSYM.2001.991866     Document Type: Article

References (10)

1. Piezoelectrically actuated droplet ejector
2. Flexure mode piezoelectric transducers
3. Analysis of structural-acoustic interactions in metal-ceramic transducers
4. Coupled flexural-shear oscillations of stepwise-layered piezoceramic disk transducers
5. Calculation and investigation of flexural-mode piezoelectric disk transducers on a passive substrate in reception and radiation
6. New airborne ultrasonic transducer with high output sound pressure level
7. A matrix model of the thin piezoceramic ring
8. Piezoelectrically actuated flextensional micromachined ultrasound transducers - I: Theory
9. Piezoelectrically actuated flextensional micromachined ultrasound transducers - II: Fabrication and experiments
10. Piezoelectrically actuated flextensional micromachined ultrasound droplet ejectors