An accurate model for capacitive micromachined ultrasonic transducers

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 49, Issue 2, 2002, Pages 159-168

  Caronti, Alessandro ^b   Caliano, Giosuè ^a,b   Iula, Antonio ^a,b   Pappalardo, Massimo ^a,b  

^a IEEE

^b ROMA TRE UNIVERSITY   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DIAPHRAGMS; DIFFERENTIAL EQUATIONS; MATHEMATICAL MODELS; MICROMACHINING; STIFFNESS;

MECHANICAL IMPEDANCE;

ULTRASONIC TRANSDUCERS;

ARTICLE;

EID: 0036462535     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.985700     Document Type: Article

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