Design, fabrication, and testing of a piezoelectrically driven high flow rate micro-pump

IEEE International Symposium on Applications of Ferroelectrics

Volumn 1, Issue , 2000, Pages 297-300

  Saggere, L ^a   Hagood, N W ^a   Roberts, D C ^a   Li, H Q ^a   Steyn, J L ^a   Turner, K ^a   Carretero, J A ^a   Yaglioglu, O ^a   Su, Y H ^a   Mlcak, R ^a   Spearing, S M ^a   Breuer, K S ^a   Schmidt, M A ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMACHINING; PIEZOELECTRICITY; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE TESTING; VALVES (MECHANICAL);

CHECK VALVE; LEAD ZIRCONATE TITANATE; MICROPUMP;

PIEZOELECTRIC TRANSDUCERS;

EID: 0034472072     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. Micro-hydraulic transducer technology for actuation and power generation
2. Microfluidics-A review
3. Microflow devices and systems
4. A high frequency high flow rate piezoelectrically driven MEMS micropump