Multiple solutions in electrostatic MEMS

2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001

Volumn , Issue , 2001, Pages 290-293

  Pelesko, J A ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Electrostatic actuation; Instability; Pull in; Semilinear elliptic problem

Indexed keywords

ELECTROSTATIC ACTUATION; MASS-SPRING MODELS; PULL-IN; SEMILINEAR ELLIPTIC PROBLEM;

COMPUTATIONAL GEOMETRY; COMPUTER SIMULATION; DIELECTRIC PROPERTIES; ELECTRIC FIELDS; ELECTRIC POTENTIAL; ELECTRODES; ELECTROSTATICS; MATHEMATICAL MODELS; SYSTEMS ANALYSIS;

MICROELECTROMECHANICAL DEVICES;

EID: 1842649157     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

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