Electrical characterization of coupled and uncoupled MEMS ultrasonic transducers

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 50, Issue 3, 2003, Pages 297-304

  Oppenheim, Irving J ^a   Jain, Akash ^a   Greve, David W ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; DAMPING; DEGREES OF FREEDOM (MECHANICS); ELECTRIC ADMITTANCE; ELECTRIC CURRENTS; EQUATIONS OF MOTION; MICROELECTROMECHANICAL DEVICES; POLYSILICON; ULTRASONIC TESTING; ULTRASONIC WAVES;

ADMITTANCE MEASUREMENT; POLYSILICON CAPACITIVE DIAPHGRAMS; SINGLE-DEGREE-OF-FREEDOM MODEL; SOLID SURFACE; ULTRASONIC RADIATION;

ULTRASONIC TRANSDUCERS;

DIAGNOSTIC AGENT; SILICON;

ARTICLE; AUDITORY STIMULATION; CHEMISTRY; COMPARATIVE STUDY; ECHOGRAPHY; ELECTRIC CAPACITANCE; ELECTROCHEMISTRY; ELECTRONICS; EQUIPMENT; EQUIPMENT DESIGN; EVALUATION; INSTRUMENTATION; MATERIALS TESTING; METHODOLOGY; SENSITIVITY AND SPECIFICITY; THEORETICAL MODEL; TRANSDUCER; VALIDATION STUDY;

ACOUSTIC STIMULATION; ELECTRIC CAPACITANCE; ELECTROCHEMISTRY; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MATERIALS TESTING; MINIATURIZATION; MODELS, THEORETICAL; SENSITIVITY AND SPECIFICITY; SILICON; TRANSDUCERS; ULTRASONOGRAPHY;

EID: 0037534970     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2003.1193623     Document Type: Article

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