Characterization of one-dimensional capacitive micromachined ultrasonic immersion transducer arrays

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 48, Issue 3, 2001, Pages 750-760

  Jin, Xuecheng ^a,b   Oralkan, Ömer ^a,b   Degertekin, F Levent ^a,c   Khuri Yakub, Butrus T ^a,b  

^a IEEE   (United States)

^b STANFORD UNIVERSITY   (United States)

^c GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC CROSS COUPLINGS; CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS (CMUT);

ACOUSTIC ARRAYS; BANDWIDTH; NATURAL FREQUENCIES; RESONANCE; SENSITIVITY ANALYSIS; SIGNAL RECEIVERS; SILICON; SUBSTRATES; TRANSMITTERS; ULTRASONIC IMAGING; ULTRASONIC REFLECTION;

ULTRASONIC TRANSDUCERS;

ARTICLE;

EID: 0035324483     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.920706     Document Type: Article

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