Reliability of gate dielectrics and metal-insulator-metal capacitors

Microelectronics Reliability

Volumn 45, Issue 5-6, 2005, Pages 834-840

  Martin, Andreas ^a  

^a INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DATA REDUCTION; ELECTRIC POTENTIAL; INTEGRATED CIRCUITS; MIM DEVICES; MOS CAPACITORS; PRODUCT DESIGN;

CONSTANT CURRENT STRESS (CCS); CONSTANT VOLTAGE STRESS (CVS); GATE DIELECTRICS; PLASMA PROCESS INDUCED DAMAGE (PID);

DIELECTRIC MATERIALS;

EID: 14644395586     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2004.11.036     Document Type: Conference Paper

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