Antenna ratio definition for VLSI circuits

International Symposium on Plasma Process-Induced Damage, P2ID, Proceedings

Volumn , Issue , 1999, Pages 16-20

  Simon, Paul ^a   Luchies, Jan Marc ^a   Maly, Wojciech ^a  

^a NXP SEMICONDUCTORS   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ANTENNAS; COMPUTER SIMULATION; CRYSTAL DEFECTS; DIODES; INTEGRATED CIRCUIT LAYOUT; PLASMA INTERACTIONS; RELIABILITY; VLSI CIRCUITS; YIELD STRESS;

ANTENNA RATIO; PLASMA ETCHING INDUCED DAMAGE;

PLASMA ETCHING;

EID: 0033319074     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (17)