Detecting breakdown in ultra-thin dielectrics using a fast voltage ramp

International Integrated Reliability Workshop Final Report

Volumn , Issue , 1999, Pages 118-123

  Snyder, Eric S ^a   Suehle, John ^a  

^a Sandia Technologies Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; DIELECTRIC MATERIALS; ELECTRIC BREAKDOWN OF SOLIDS; ELECTRIC SPACE CHARGE; GATES (TRANSISTOR); LEAKAGE CURRENTS; OXIDES; STRESS ANALYSIS; WEIBULL DISTRIBUTION;

FAST VOLTAGE RAMP; ULTRATHIN DIELECTRICS;

MOSFET DEVICES;

EID: 0033282869     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)