Modeling of substrate related extrinsic oxide failure distributions

Annual Proceedings - Reliability Physics (Symposium)

Volumn , Issue , 2002, Pages 393-403

  Pompl, Thomas ^a   Kerber, M ^a   Innertsberger, G ^a   Allers, K H ^a   Obry, M ^a   Krasemann, A ^a   Temmler, D ^a  

^a INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTAL DEFECTS; DIELECTRIC MATERIALS; ELECTRIC BREAKDOWN; MATHEMATICAL MODELS; SUBSTRATES; WEIBULL DISTRIBUTION;

ELECTRIC STRESSES;

SILICON WAFERS;

EID: 0036083711     PISSN: 00999512     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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