Defect production, degradation, and breakdown of silicon dioxide films

Solid-State Electronics

Volumn 41, Issue 7, 1997, Pages 957-965

  Dimaria, D J ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BAND STRUCTURE; CARRIER CONCENTRATION; CRYSTAL DEFECTS; ELECTRIC BREAKDOWN OF SOLIDS; ELECTRIC CONDUCTIVITY OF SOLIDS; HOT CARRIERS; IONIZATION OF SOLIDS; SILICA;

CRITICAL DENSITY; HOLE INJECTION;

DIELECTRIC FILMS;

EID: 0031187851     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1101(97)00006-3     Document Type: Article

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