Packaged bulk micromachined resonant force sensor for high temperature applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4019, Issue , 2000, Pages 379-388

  Haueis, M ^a   Dual, J ^a   Cavalloni, C ^a   Gnielka, M ^a   Buser, R ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONICS PACKAGING; FABRY-PEROT INTERFEROMETERS; FIBER OPTIC SENSORS; FORCE MEASUREMENT; HIGH TEMPERATURE APPLICATIONS; INTEGRATED OPTOELECTRONICS; MICROSENSORS; OPTICAL RESONATORS; REACTIVE ION ETCHING; SILICON SENSORS; THERMAL STRESS; VIBRATION MEASUREMENT;

MICROMACHINED RESONANT FORCE SENSORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033707663     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (21)