Fully integrated on-chip laboratories for Mems-based material and structure mechanical analysis

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4400, Issue , 2001, Pages 115-126

  Minotti, Patrice ^a  

^a FEMTO ST INSTITUTE   (France)

Author keywords

Bending fracture; Contact interactions; Electrostatic actuators; Material; Mechanical characterization; Mems; Microactuator loading characteristics; Polysilicon fracture strength; Tensile fracture

Indexed keywords

BENDING (DEFORMATION); CHEMICAL VAPOR DEPOSITION; ELECTROSTATIC ACTUATORS; FRACTURE TOUGHNESS; POLYSILICON; SEMICONDUCTING FILMS;

BENDING FRACTURE;

MICROELECTROMECHANICAL DEVICES;

EID: 0035759019     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.445594     Document Type: Conference Paper

References (16)

1. S. Lee, C. Cho, J. Kim, S. Park, S. Yi, J. Kim and D. Dan Cho, "The effects of post-deposition processes on polysilicon Young's modulus, J. Micromech. Microeng. 8, pp. 330-337, 1998.
2. K. Mitsui, "Measurement and evaluation methods of micromachine", Micromachine 33, pp. 16-17, 2000.
3. M.P. de Boer, B.D. Jensen and F. Bitsie, "A small area in situ MEMS test structure to measure fracture strength by electrostatic probing", Proc. SPIE Materials and Device Characterization in Micromachining, Vol. 3875, Santa Clara, 1999.
4. W.N. Sharpe and K. Jackson, "Tensile testing of MEMS materials", Proc. SEM IX, paper n° 533, Orlando, 2000.
5. H. Kahn, N. Tayebi, R. Ballarini, R.L. Mullen and A.H. Heuer, "Fracture and fatigue of polysilicon MEMS devices, Proc. Int. Conf. Solid-State Sensors & Actuators, pp. 924-927, Sendai, 1999.
6. Q. Zou, Z. Li and L. Liu, "New methods for measuring mechanical properties of thin films in micromachining", Sensors and Actuators A 48, pp. 137-143, 1995.
7. W.N. Sharpe, B. Yuan, R. Vaidyanathan and R.L. Edwards, "Measurements of Young's modulus, Poisson ratio and tensile strength of polysilicon", Proc. 10 IEEE/MEMS, pp. 424-429, Nagoya, 1997.
8. T. Akiyama and K. Shon, "Controlled stepwise motion in polysilicon microstructures, J. MEMS 3, pp. 106-110, 1993.
9. P. Minotti, G. Bourbon, P. Langlet and T. Masuzawa, "Arrayed electrostatic scratch drive actuators: toward visible effects up to the human scale", J. of Intelligent Material Systems and Structures 9, pp.837-846, 1998.
10. W.N. Sharpe, K.T. Turner and R.L. Edwards, "Tensile testing of polysilicon", J. Experimental Mechanics 39, pp. 161-169, 1999.
11. S. Greek, F. Ericson, S. Johanson, M. Fürtsch and A. Rump, "Mechanical characterization of thick polysilicon films: Young's modulus and fracture strength evaluated with microstructures", J. Micromech. Microeng. 9,pp.245-251, 1999.
12. J.J. Sniegowski and M.P. de Boer, "IC-compatible polysilicon surface micromachining", Annu. Rev. Mater. Sci. 30, pp.299-333, 2000.
13. K. Burhanettin, P. Buchilloux and K. Uchino, "Piezoelectric micromotor using a metal-ceramic composite structure", IEEE Transactions on UFFC 47, pp. 836-843, 2000.
14. th IEEE/MEMS, pp. 221-226, Nagoya, 1997.
15. P. Minotti, P. Langlet, G. Bourbon and T. Masuzawa, "Design and characterization of high-torque/low-speed silicon-based electrostatic micromotors using stator/rotor contact interactions", Jpn. J. Appl. Phys. 37, pp. 359-361, 1998.
16. P. Minotti, P. Langlet, G. Bourbon, T. Masuzawa and P. Le Moal, "Direct-drive electrostatic micromotors using flexible polysilicon rotors", J. of Intelligent Material Systems and Structures 9, pp.829-836, 1998.