Performance analysis system for MEMS using automated imaging methods

IEEE International Test Conference (TC)

Volumn , Issue , 1998, Pages 442-447

  LaVigne, Glenn F ^a   Miller, Sam L ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMATIC TESTING; EQUIPMENT TESTING; IMAGE ANALYSIS; RELIABILITY;

AUTOMATED IMAGING TECHNIQUES;

MICROELECTROMECHANICAL DEVICES;

EID: 0032318125     PISSN: 10893539     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)