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Volumn 36, Issue 5, 2001, Pages 437-450

Microscopic grid methods - Resolution and sensitivity

Author keywords

Atomic force microscope; Fourier transform; Grid method; Optical microscope; Scanning electronic microscope; Spatial resolution

Indexed keywords

ATOMIC FORCE MICROSCOPY; DEFORMATION; OPTICAL MICROSCOPY; SCANNING ELECTRON MICROSCOPY; SENSITIVITY ANALYSIS;

EID: 0035499130     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0143-8166(01)00071-9     Document Type: Article
Times cited : (16)

References (13)
  • 3
    • 0032095134 scopus 로고    scopus 로고
    • Development in optical methods for reliability analysis in electronic packaging applications
    • (1998) J Electron Packag , vol.10 , pp. 186-193
    • Guo, Y.1    Liu, S.2
  • 7
    • 0020919219 scopus 로고
    • Fourier transform profilometry for the automatic measurement of 3-D object shapes
    • (1983) Appl Opt , vol.22 , pp. 3977-3982
    • Takeda, M.1    Mutoh, K.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.