Basic aspects and challenges of semiconductor gas sensors

MRS Bulletin

Volumn 24, Issue 6, 1999, Pages 18-24

  Shimizu, Yasuhiro ^a   Egashira, Makoto ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE CARRIERS; CHEMISORPTION; ELECTRIC RESISTANCE; ELECTRON TRANSPORT PROPERTIES; GRAIN BOUNDARIES; GRAIN SIZE AND SHAPE; MOS DEVICES; OXIDES; THICK FILMS; THIN FILMS;

ELECTRONIC CONDUCTION; SEMICONDUCTIVE METAL OXIDE; SEMICONDUCTOR GAS SENSOR;

CHEMICAL SENSORS;

EID: 0033149651     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/S0883769400052465     Document Type: Article

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