Diode-based microfabricated hot-plate sensor

Sensors and Actuators, A: Physical

Volumn 65, Issue 2-3, 1998, Pages 128-135

  Saul, Cyro Ketzer ^a   Zemel, Jay N ^b,c  

^a FEDERAL UNIVERSITY OF RIO GRANDE DO SUL   (Brazil)

^b UNIVERSITY OF PENNSYLVANIA   (United States)

^c US Naval Ordnance Laboratory   (United States)

Author keywords

Hot plates; Microfabrication; Silicon

Indexed keywords

ELECTRIC RESISTANCE; RESISTORS; SEMICONDUCTOR DIODES; SUBSTRATES; TEMPERATURE MEASUREMENT; THERMAL CONDUCTIVITY OF GASES;

DIODE BASED MICROFABRICATED HOT PLATE SENSORS;

SILICON SENSORS;

EID: 0032520310     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01682-8     Document Type: Article

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