Accelerated life testing for micro-machined chemical sensors

IEEE Transactions on Reliability

Volumn 47, Issue 2, 1998, Pages 135-141

  Bosc, Jean Marc ^a,b   Guo, Yifan ^a,b   Sarihan, Vijay ^a,b   Lee, Tom ^a,b  

^a Motorola Labs   (France)

^b MOTOROLA INC   (United States)

Author keywords

Accelerated life testing; Chemical sensor; Gas sensor; Micro machined silicon device

Indexed keywords

MICROMACHINING; QUALITY ASSURANCE; RELIABILITY; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR DEVICE TESTING; THIN FILM DEVICES;

ACCELERATED LIFE TESTING; MICROMACHINED CHEMICAL SENSORS;

CHEMICAL SENSORS;

EID: 0032083810     PISSN: 00189529     EISSN: None     Source Type: Journal    
DOI: 10.1109/24.722276     Document Type: Article

References (4)

1. I. Sayago, J. Gutiérrez, L. Arés, et al. "Long-term reliability of sensors for detection of nitrogen oxides", Sensor and Actuator B, vol 26-27, 1995, pp 56-58.
2. L. De Angelis, R. Riva, "Selectivity and stability of tin dioxide sensor for methane", Sensor and Actuator B, vol 28, 1995, pp 25-29.
3. 2 thick-film gas sensor", Sensor and Actuator B, vol 18-19, 1994, pp 453-456.
4. Single and Multiple Station Carbon Monoxide Detectors; Standard for Safety; UL 2034.