Photo-assisted silicon micromachining: Opportunities for chemical sensing

Sensors and Actuators, B: Chemical

Volumn 35, Issue 1-3, 1996, Pages 255-261

  Tuller, H L ^a   Mlcak, R ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

Chemical sensing; Photo assisted silicon micromachining

Indexed keywords

ASPECT RATIO; CHEMICAL SENSORS; ELECTROCHEMISTRY; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PHOTOCHEMICAL REACTIONS;

MICROELECTROMECHANICAL SYSTEMS TECHNOLOGY (MEMS); PHOTO ASSISTED SILICON MICROMACHINING;

SILICON SENSORS;

EID: 0030234292     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(97)80064-0     Document Type: Article

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